Since the 1990s, the target has boomed into a specialized industry. The demand for targets in China and the Asia-Pacific region accounts for more than 70% of the world's market share. A large number of different deposition techniques are used to deposit and grow various thin films, and the target is the key to the production of thin films, and the quality is of great significance to the thin film. At present, high-end quality targets are mainly produced by: Japan, Germany, and the United States. China's target industry started relatively late, and there are many gaps between foreign countries in terms of product quality and fine standards. There are also many universities and research institutions in China that actively invest in targets. A lot of research and development, after a few years of development also emerged in a number of outstanding companies and institutions in the target industry. In China, it has occupied most of the medium and less demanding target market.

1 Target Application Industry Classification

1.1 Decoration, tooling and coating industry target chromium target (Cr), flat chromium target, sprayed chrome tube;

Chromium silicon target 90/10Wt%, 50/50at%, 25/75at% (arc, planar target, rotating tube target);

Titanium-aluminum target 50/50at%, 70Ti/30at%, 67AL/33at% (arc, planar target, rotating tube target);

Titanium aluminum silicon target 1:1:1at%, 1:2:1at% (arc, planar target, rotating tube target);

Target, titanium tube target, zirconium target

Gold target, rose gold target;

Graphite target, nickel target, aluminum target, stainless steel target, etc.

1.2 Solar Photothermal Industry Targets

ZAO aluminum target ZAO; silicon target; titanium target, titanium oxide target; aluminum target; chromium target, nickel chromium; zinc aluminum, tungsten, molybdenum target and so on.

1.3 Large area of automotive glass coating

Silicon-aluminum target, rotating silicon aluminum target; titanium oxide target; tin target; chromium target; silicon target; titanium target, stainless steel target.

1.4 Flat Display Industry

ITO target; Silica target; High-purity silicon target 5-7N; High-purity chromium target 3N5; TFT molybdenum target; Molybdenum-bismuth target; Tungsten-titanium, target 90/10wt%; High-purity aluminum target, etc.

1.5 Optical, Optical Communication, Optical Storage Industry

Silver Target; Ruthenium Target; Zinc Sulfide Target; High Purity Aluminum Target; Silicon Target.

2 commonly used target

Common target shapes include arc targets, planar targets, and rotating tube targets.

2.1 How to increase the utilization rate of planar targets

(1) Change the direction of movement of the magnet

(2) Change the distribution width and height of magnetic lines

2.2 Target Performance and Requirements

The quality of the target material directly affects the physical, appearance and mechanical properties of the film. As a result, the quality of the target material is judged more strictly.

Should meet the following requirements: low impurity and oxygen content, high purity; high density; uniform composition and structure; fine grain size.

2.3 Poor Target Defects

a) and b) for the target surface after ablation of a chrome target

c) The dent on the target surface is caused by improper installation of the arcing needle

d) Crystal coating target density is not enough, difference after ablation

e) Poor plasma torch titanium oxide rotary tube target

3 Introduction of several common target applications

3.1 Decoration, tooling, titanium aluminum target applications

High titanium low aluminum: 50/50at% 70Ti/30at% 80Ti/20at%

High aluminum low titanium: 67AL/33at% 75AI/25wt% 80AL/20 wt%

3.2 Titanium Aluminum Target Applications

Titanium-aluminum alloy targets can not be avoided by casting to loosen and shrink holes. Large-size titanium-aluminum cast pipes and ingots cannot guarantee sealing and waterproofing effects when they are made into rotating tube targets, and the wall thickness changes as the wall of the pipe is etched. Thin, Loose and Shrinkage As long as there is a hole connected, the sealing performance will become worse. Light leakage, target tube glow discharge, or a large amount of mixed gas in the reaction is not the film is off the color is wrong. In severe cases, water is directly sprayed from the sparse hole into the vacuum chamber, contaminating the true cavity and the vacuum unit. Titanium-aluminum targets made by powder metallurgy are free from porosity and shrinkage, but they are also porous materials from the microscopic view of powder metallurgy. Therefore, in order to make titanium-aluminum rotating tube targets, the denseness of the material is very strict and the density must be > More than 98%. However, meeting the density requirement does not mean that it can be used. If the titanium aluminum ingot is high in oxygen content and the microstructure is unreasonable, the titanium aluminum ingot has large internal stress and can easily collapse, and it cannot be used as a rotary tube target. Therefore, there are many requirements for the powder preparation and the particle size distribution. Even if these conditions are satisfied, the powder metallurgy titanium aluminum ring must be tied to the stainless steel tube or titanium tube. Due to the large thermal expansion coefficient of titanium aluminum, the local target material expansion may reach 0.5-1 MM when sputtering, so now the traditional binding ingot The method cannot effectively solve this problem. Titanium-aluminum ingot separation occurs, and the target surface cannot conduct heat and burst. As for the so-called tight-fitting ingots and plasma-coated titanium-aluminum-aluminum alloy targets, they are meaningless solutions and cannot be used. Low-end watches and clocks do not have film thickness and gloss requirements. Mostly TiAlN is deposited on an arc titanium aluminum target. High-grade brand watches require a thickness of 1 metre or more, and the gloss cannot be reduced. The arc is not affected by the droplets and has no advantage in smoothing the thick film. At present, it is better to use a rotating tube target to deposit TiAlN. Not only is the color closer to rose gold, but the gloss is not affected even after the thickness is increased.

3.3 SVC Series Silicon Alloy Targets

The main target is the deposition of superhard films. In recent years, watches and mobile phones have requirements in this regard: such as black anti-fingerprint super hard film, stainless steel case hardened, imitation gold super hard film and so on. This series of silicon-containing targets is a co-deposited film of various compounds during the coating process. For example, a chrome-silicon target reacts with a reactive gas, C2H2, when reacting with an IP black film. The chromium ions react with the element C to deposit black chromium carbide (CrC). Silicon (Si) reacts with C to form SiC. The alternately deposited and seized films of this metal carbide ceramic and silicon carbide not only increase the hardness, but also maintain the low coefficient of friction on the surface of silicon carbide. More recent evidence shows that the Ti/Cr/TiAlC/SiC structural thin film formed by the reaction of Ti-Si target and Ti-Si target is the best transitional bonding layer of DLC. It can grow DLC thick film on Ti/Cr/TiAlC/SiC. Very meaningful thing. Professor Yuan Yuan pointed out that the coating expert has a microscopic diamond nitride wrapped with titanium aluminum nitride PLATTING coating, it may be used is silicon aluminum target and titanium target, or titanium aluminum silicon target deposited film.

3.4 Crystal Coating Series Targets

Crystal jewelry, lighting and other coatings have grown rapidly in recent years, mainly concentrated in the ancient town of Zhongshan and Pujiang, Yiwu. The ancient town is home to dozens of large and small enterprises with lighting crystal coating. Zhejiang Yiwu is mainly made of crystal ornaments. Most of them are using vacuum arc plus magnetron coating equipment. Mainly dry-colored, amber, wine red, AB color, rose red, golden yellow, dark green, liver color and so on. Crystal coating amber, burgundy target is Shenzhen Silicon Valley company iron base alloy patented target. The main thrust is rotating tube target and planar target. Arc target is not as good as the rotating target because of the large evaporation amount, and the low end of the market is also acceptable. The high-end coating is represented by Jiangmen Tangren Film Co., Ltd. The product quality is stable and the appearance is uniform and beautiful. The company uses a large planar target. Since the crystal coating factory is mostly a small plant with one machine or two machines, the coating technology is still relatively weak, and there is no concept of pre-cleaning, so the film is often dropped or faded. Crystal coating cleaning is not suitable for traditional watch and jewelry cleaning methods.

3.4.1 Crystal Coating Process Case Cleaning Reference

• Fill the crystal pendant with stainless steel square net; • Ultra-sonic ultrasonic degreasing water for 5-10 minutes (1KG/100L pure water) at 80-90°C. The main purpose is to remove oil and oily substances;

• Over pure water;

• 40-50 °C ultrasonic low concentration pickling (2L/100L pure water) is mainly for the purpose of removing surface moldy and long-skinned pollutants);

• Over pure water;

• Hydrogen peroxide and ammonium hydrogen fluoride dilute water (0.5L hydrogen peroxide/50g hydrogen fluoride ammonia/100L water) (mainly activated by surface, increasing film and crystal binding capacity);

• Multi-cylinder running water rinsing;

• Rack baking 100-130 °C;

• Into the furnace.

3.4.2 Crystal Coating Process Case Reference

• Vacuum extraction is better than 1.0×10-2 Pa;

• Into the argon vacuum 3.0 × 100 Pa;

• Bias -300~-500V (glow cleaning) for 5 minutes;

• restore vacuum;

• Adjust the speed of the rotary rack;

• Pass argon and oxygen (1:2) to a vacuum of 7.0×10-1Pa. After vacuum stabilization, turn on all arcs (100-140A) for 60-90 seconds.

• Turn off the arc source and end the gas coating.

• Released.

3.4.3 Crystal coating film withdrawal formulation formula

Amber, Burgundy, Cognac 3L Hydrochloric Acid/10L Pure Water Soak

AB color, liver color, gun color 20g KOH/50L hydrogen peroxide soak

Chrome gun black 50KG potassium permanganate/50L water temperature 80°C-90°C soaking

3.5 Domestic and Foreign Titanium Aluminum Target Manufacturers' Production Capacity

3.6 Comparison of Imported and Domestic ITO Targets 3.7 Market Application of ITO Targets